Method and post structures for interferometric modulation

ABSTRACT

An interferometric modulator includes a post structure comprising an optical element. In a preferred embodiment, the optical element in the post structure is a reflective element, e.g., a mirror. In another embodiment, the optical element in the post structure is an etalon, e.g., a dark etalon. The optical element in the post structure may decrease the amount of light that would otherwise be retroreflected from the post structure. In various embodiments, the optical element in the post structure increases the brightness of the interferometric modulator by redirecting light into the interferometric cavity. For example, in certain embodiments, the optical element in the post structure increases the backlighting of the interferometric modulator.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. patent application Ser. No.11/052,004, filed Feb. 4, 2005, which claims priority benefit under 35U.S.C. § 119(e) to U.S. Provisional Patent Application Ser. No.60/613,471, filed Sep. 27, 2004, which are hereby incorporated byreference in their entireties.

BACKGROUND

1. Field of the Invention

This invention relates generally to optical modulator devices andmethods for making optical modulators, and more particularly tointerferometric modulators used in displays.

2. Description of the Related Art

A variety of different types of spatial light modulators can be used forimaging applications. One type of a spatial light modulator is aninterferometric modulator. Interferometric modulator devices can bearranged in an array configuration to provide a display assembly havingadvantageous operational and performance characteristics.Interferometric modulator devices operate by employing opticalinterference to provide displays having rich color characteristics aswell as low power consumption. Interferometric modulators have at leasttwo states and are configured such that, in at least one of the states,incident light is reflected and interferes to provide correspondingdifferent appearances to a viewer. In one state, a relatively narrowband reflection may present a distinct color to the viewer, such as ared, green, or blue color. In another state, the interferometricmodulator can act on the incident light so as to present a reflecteddark or black appearance to a viewer.

In order to provide increased contrast in the various viewing states, itis desirable that an array of interferometric devices presents a moreuniformly dark or black appearance in the dark state. Similarly, it isdesirable in the colored viewing states to present colors which arericher and more vibrant.

SUMMARY

The system, method, and devices described herein each have severalaspects, no single one of which is solely responsible for its desirableattributes. Without limiting the scope of this invention, its moreprominent features will now be discussed briefly. After considering thisdiscussion, and particularly after reading the section entitled“Detailed Description of Preferred Embodiments” one will understand howthe features of the systems, methods and devices described hereinprovide advantages that include, for example, improved deviceperformance.

An embodiment provides a spatial light modulator (e.g., aninterferometric modulator) that includes a post structure, wherein thepost structure contains an optical element. In a preferred embodiment,the optical element in the post structure is a reflective element, e.g.,a mirror. In another embodiment, the optical element in the poststructure is an etalon, e.g., a dark etalon. In another embodiment, thepost structure comprises a reflective element and a dark etalon.

The optical element in the post structure may be configured in variousways. For example, in certain embodiments, the optical element in thepost structure decreases the amount of light that would otherwise beretroreflected from the post structure. In other embodiments, theoptical element in the post structure increases the backlighting of theinterferometric modulator. In various embodiments, the optical elementin the post structure increases the brightness of the interferometricmodulator by redirecting light into the interferometric cavity.

Another embodiment provides a method for making an interferometricmodulator. In this method, a reflective layer is deposited onto asubstrate to form a first mirror. A sacrificial layer is deposited overthe first mirror. Apertures are formed in the sacrificial layer and postmaterial is deposited into the apertures. An optical element is formedover the post material and a moveable second mirror is formed over thesacrificial layer and the optical element. The sacrificial layer isremoved to thereby form an interferometric cavity.

These and other embodiments are described in greater detail below.

BRIEF DESCRIPTION OF THE DRAWINGS

These and other aspects of the invention will be readily apparent fromthe following description and from the appended drawings (not to scale),which are meant to illustrate and not to limit the invention, andwherein:

FIG. 1 is an isometric view depicting a portion of one embodiment of aninterferometric modulator display in which a movable reflective layer ofa first interferometric modulator is in a released position and amovable reflective layer of a second interferometric modulator is in anactuated position.

FIG. 2 is a system block diagram illustrating one embodiment of anelectronic device incorporating a 3×3 interferometric modulator display.

FIG. 3 is a diagram of movable mirror position versus applied voltagefor one exemplary embodiment of an interferometric modulator of FIG. 1.

FIG. 4 is an illustration of a set of row and column voltages that maybe used to drive an interferometric modulator display.

FIGS. 5A and 5B illustrate one exemplary timing diagram for row andcolumn signals that may be used to write a frame of display data to the3×3 interferometric modulator display of FIG. 2.

FIG. 6A is a cross section of the device of FIG. 1.

FIG. 6B is a cross section of an alternative embodiment of aninterferometric modulator.

FIG. 6C is a cross section of another alternative embodiment of aninterferometric modulator.

FIG. 7A shows a cross section of an interferometric modulator thatschematically illustrates a post structure that is transparent. FIG. 7Bshows a cross section of an interferometric modulator that schematicallyillustrates a post structure that is reflective.

FIG. 8A is a reproduction of a photomicrograph of an array ofinterferometric modulators having metal posts. FIG. 8B is a reproductionof a photomicrograph of an array of interferometric modulators havingsilicon oxide posts.

FIG. 9 shows a cross-section of an interferometric modulator thatschematically illustrates post structures that comprise reflectiveelements, some of which form etalons.

FIG. 10 shows a cross-section of a backlit interferometric modulatorschematically illustrating post structures that comprise reflectiveelements configured to direct light into the optical cavity of theinterferometric modulator.

FIG. 11 shows a cross-section of a front lit interferometric modulatorschematically illustrating post structures that comprise reflectiveelements configured to increase brightness of the interferometricmodulator.

FIG. 12 shows a flow chart illustrating a process for making aninterferometric modulator having a post structure that contains anoptical element.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS

As described more fully below, reflective optical elements may beincluded in post structures in interferometric modulators. In certainembodiments, these reflective optical elements may form etalons thatreflect a particular color or wavelength range. Such etalons, which maycomprise, for example, dark etalons, may cause the post structure toappear dark as seen by a viewer. These optical elements may increase thecontrast of a display by providing a more uniformly dark or blackappearance (reducing the area of the display that is relatively bright)when the interferometric modulator is in a dark state. Similarly,brighter more vibrant colors that are not “washed out” by bright regionsare provided when the interferometric modulator is in a bright state.Reflective elements may also be included that direct illumination,either backlighting or front lighting, into the optical cavity of theinterferometric modulator.

As will be apparent from the following description, the structuresdescribed herein may be implemented in any device that is configured todisplay an image, whether in motion (e.g., video) or stationary (e.g.,still image), and whether textual or pictorial. More particularly, it iscontemplated that the structures and methods may be implemented in orassociated with a variety of electronic devices such as, but not limitedto, mobile telephones, wireless devices, personal data assistants(PDAs), hand-held or portable computers, GPS receivers/navigators,cameras, MP3 players, camcorders, game consoles, wrist watches, clocks,calculators, television monitors, flat panel displays, computermonitors, auto displays (e.g., odometer display, etc.), cockpit controlsand/or displays, display of camera views (e.g., display of a rear viewcamera in a vehicle), electronic photographs, electronic billboards orsigns, projectors, architectural structures (e.g., tile layouts),packaging, and aesthetic structures (e.g., display of images on a pieceof jewelry). More generally, the structures and methods described hereinmay be implemented in electronic switching devices, their manufacture,and use.

The following detailed description is directed to certain specificembodiments of the invention. However, the invention can be embodied ina multitude of different ways. In this description, reference is made tothe drawings wherein like parts are designated with like numeralsthroughout.

One interferometric modulator display embodiment comprising aninterferometric MEMS display element is illustrated in FIG. 1. In thesedevices, the pixels are in either a bright or dark state. In the bright(“on” or “open”) state, the display element reflects a large portion ofincident visible light to a user. When in the dark (“off” or “closed”)state, the display element reflects little incident visible light to theuser. Depending on the embodiment, the light reflectance properties ofthe “on” and “off” states may be reversed. MEMS pixels can be configuredto reflect predominantly at selected colors, allowing for a colordisplay in addition to black and white.

FIG. 1 is an isometric view depicting two adjacent pixels in a series ofpixels of a visual display, wherein each pixel comprises a MEMSinterferometric modulator. In some embodiments, an interferometricmodulator display comprises a row/column array of these interferometricmodulators. Each interferometric modulator includes a pair of reflectivelayers positioned at a variable and controllable distance from eachother to form a resonant optical cavity with at least one variabledimension. In one embodiment, one of the reflective layers may be movedbetween two positions. In the first position, referred to herein as thereleased state, the movable layer is positioned at a relatively largedistance from a fixed partially reflective layer. In the secondposition, the movable layer is positioned more closely adjacent to thepartially reflective layer. Incident light that reflects from the twolayers interferes constructively or destructively depending on theposition of the movable reflective layer, producing either an overallreflective or non-reflective state for each pixel.

The depicted portion of the pixel array in FIG. 1 includes two adjacentinterferometric modulators 12 a and 12 b. In the interferometricmodulator 12 a on the left, a movable and highly reflective layer 14 ais illustrated in a released position at a predetermined distance from afixed partially reflective layer 16 a. In the interferometric modulator12 b on the right, the movable highly reflective layer 14 b isillustrated in an actuated position adjacent to the fixed partiallyreflective layer 16 b.

The fixed layers 16 a, 16 b are electrically conductive, partiallytransparent and partially reflective, and may be fabricated, forexample, by depositing one or more layers each of chromium andindium-tin-oxide onto a transparent substrate 20. The layers arepatterned into parallel strips, and may form row electrodes in a displaydevice as described further below. The movable layers 14 a, 14 b may beformed as a series of parallel strips of a deposited metal layer orlayers (orthogonal to the row electrodes 16 a, 16 b) deposited on top ofposts 18 and an intervening sacrificial material deposited between theposts 18. When the sacrificial material is etched away, the deformablemetal layers are separated from the fixed metal layers by a defined airgap 19. A highly conductive and reflective material such as aluminum maybe used for the deformable layers, and these strips may form columnelectrodes in a display device.

With no applied voltage, the cavity 19 remains between the layers 14 a,16 a and the deformable layer is in a mechanically relaxed state asillustrated by the pixel 12 a in FIG. 1. However, when a potentialdifference is applied to a selected row and column, the capacitor formedat the intersection of the row and column electrodes at thecorresponding pixel becomes charged, and electrostatic forces pull theelectrodes together. If the voltage is high enough, the movable layer isdeformed and is forced against the fixed layer (a dielectric materialwhich is not illustrated in this Figure may be deposited on the fixedlayer to prevent shorting and control the separation distance) asillustrated by the pixel 12 b on the right in FIG. 1. The behavior isthe same regardless of the polarity of the applied potential difference.In this way, row/column actuation that can control the reflective vs.non-reflective pixel states is analogous in many ways to that used inconventional LCD and other display technologies.

FIGS. 2 through 5 illustrate one exemplary process and system for usingan array of interferometric modulators in a display application. FIG. 2is a system block diagram illustrating one embodiment of an electronicdevice that may incorporate aspects of the invention. In the exemplaryembodiment, the electronic device includes a processor 21 which may beany general purpose single- or multi-chip microprocessor such as an ARM,Pentium®, Pentium II®, Pentium III®, Pentium IV®, Pentium® Pro, an 8051,a MIPS®, a Power PC®, an ALPHA®, or any special purpose microprocessorsuch as a digital signal processor, microcontroller, or a programmablegate array. As is conventional in the art, the processor 21 may beconfigured to execute one or more software modules. In addition toexecuting an operating system, the processor may be configured toexecute one or more software applications, including a web browser, atelephone application, an email program, or any other softwareapplication.

In one embodiment, the processor 21 is also configured to communicatewith an array controller 22. In one embodiment, the array controller 22includes a row driver circuit 24 and a column driver circuit 26 thatprovide signals to a pixel array 30. The cross section of the arrayillustrated in FIG. 1 is shown by the lines 1-1 in FIG. 2. For MEMSinterferometric modulators, the row/column actuation protocol may takeadvantage of a hysteresis property of these devices illustrated in FIG.3. It may require, for example, a 10 volt potential difference to causea movable layer to deform from the released state to the actuated state.However, when the voltage is reduced from that value, the movable layermaintains its state as the voltage drops back below 10 volts. In theexemplary embodiment of FIG. 3, the movable layer does not releasecompletely until the voltage drops below 2 volts. There is thus a rangeof voltage, about 3 to 7 V in the example illustrated in FIG. 3, wherethere exists a window of applied voltage within which the device isstable in either the released or actuated state. This is referred toherein as the “hysteresis window” or “stability window.” For a displayarray having the hysteresis characteristics of FIG. 3, the row/columnactuation protocol can be designed such that during row strobing, pixelsin the strobed row that are to be actuated are exposed to a voltagedifference of about 10 volts, and pixels that are to be released areexposed to a voltage difference of close to zero volts. After thestrobe, the pixels are exposed to a steady state voltage difference ofabout 5 volts such that they remain in whatever state the row strobe putthem in. After being written, each pixel sees a potential differencewithin the “stability window” of 3-7 volts in this example. This featuremakes the pixel design illustrated in FIG. 1 stable under the sameapplied voltage conditions in either an actuated or releasedpre-existing state. Since each pixel of the interferometric modulator,whether in the actuated or released state, is essentially a capacitorformed by the fixed and moving reflective layers, this stable state canbe held at a voltage within the hysteresis window with almost no powerdissipation. Essentially no current flows into the pixel if the appliedpotential is fixed.

In typical applications, a display frame may be created by asserting theset of column electrodes in accordance with the desired set of actuatedpixels in the first row. A row pulse is then applied to the row 1electrode, actuating the pixels corresponding to the asserted columnlines. The asserted set of column electrodes is then changed tocorrespond to the desired set of actuated pixels in the second row. Apulse is then applied to the row 2 electrode, actuating the appropriatepixels in row 2 in accordance with the asserted column electrodes. Therow 1 pixels are unaffected by the row 2 pulse, and remain in the statethey were set to during the row 1 pulse. This may be repeated for theentire series of rows in a sequential fashion to produce the frame.Generally, the frames are refreshed and/or updated with new display databy continually repeating this process at some desired number of framesper second. A wide variety of protocols for driving row and columnelectrodes of pixel arrays to produce display frames are also well knownand may be used in conjunction with the present invention.

FIGS. 4 and 5 illustrate one possible actuation protocol for creating adisplay frame on the 3×3 array of FIG. 2. FIG. 4 illustrates a possibleset of column and row voltage levels that may be used for pixelsexhibiting the hysteresis curves of FIG. 3. In the FIG. 4 embodiment,actuating a pixel involves setting the appropriate column to −V_(bias),and the appropriate row to +ΔV, which may correspond to −5 volts and +5volts respectively Releasing the pixel is accomplished by setting theappropriate column to +V_(bias), and the appropriate row to the same+ΔV, producing a zero volt potential difference across the pixel. Inthose rows where the row voltage is held at zero volts, the pixels arestable in whatever state they were originally in, regardless of whetherthe column is at +V_(bias), or −V_(bias).

FIG. 5B is a timing diagram showing a series of row and column signalsapplied to the 3×3 array of FIG. 2 which will result in the displayarrangement illustrated in FIG. 5A, where actuated pixels arenon-reflective. Prior to writing the frame illustrated in FIG. 5A, thepixels can be in any state, and in this example, all the rows are at 0volts, and all the columns are at +5 volts. With these applied voltages,all pixels are stable in their existing actuated or released states.

In the FIG. 5A frame, pixels (1,1), (1,2), (2,2), (3,2) and (3,3) areactuated. To accomplish this, during a “line time” for row 1, columns 1and 2 are set to −5 volts, and column 3 is set to +5 volts. This doesnot change the state of any pixels, because all the pixels remain in the3-7 volt stability window. Row 1 is then strobed with a pulse that goesfrom 0, up to 5 volts, and back to zero. This actuates the (1,1) and(1,2) pixels and releases the (1,3) pixel. No other pixels in the arrayare affected. To set row 2 as desired, column 2 is set to −5 volts, andcolumns 1 and 3 are set to +5 volts. The same strobe applied to row 2will then actuate pixel (2,2) and release pixels (2,1) and (2,3). Again,no other pixels of the array are affected. Row 3 is similarly set bysetting columns 2 and 3 to −5 volts, and column 1 to +5 volts. The row 3strobe sets the row 3 pixels as shown in FIG. 5A. After writing theframe, the row potentials are zero, and the column potentials can remainat either +5 or −5 volts, and the display is then stable in thearrangement of FIG. 5A. It will be appreciated that the same procedurecan be employed for arrays of dozens or hundreds of rows and columns. Itwill also be appreciated that the timing, sequence, and levels ofvoltages used to perform row and column actuation can be varied widelywithin the general principles outlined above, and the above example isexemplary only, and any actuation voltage method can be used with thepresent invention.

The details of the structure of interferometric modulators that operatein accordance with the principles set forth above may vary widely. Forexample, FIGS. 6A-6C illustrate three different embodiments of themoving mirror structure. FIG. 6A is a cross section of the embodiment ofFIG. 1, where a strip of metal material 14 is deposited on orthogonallyextending supports 18. In FIG. 6B, the moveable reflective material 14is attached to supports at the corners only, on tethers 32. In FIG. 6C,the moveable reflective material 14 is suspended from a deformable layer34. This embodiment has benefits because the structural design andmaterials used for the reflective material 14 can be optimized withrespect to the optical properties, and the structural design andmaterials used for the deformable layer 34 can be optimized with respectto desired mechanical properties. The production of various types ofinterferometric devices is described in a variety of publisheddocuments, including, for example, U.S. Published Application2004/0051929. A wide variety of well known techniques may be used toproduce the above described structures involving a series of materialdeposition, patterning, and etching steps.

Interferometric modulators of the general design discussed abovecomprise at least one post structure. (See, e.g., post 18 in FIGS. 1 and6). A “post” or “post structure” is a structure located at the side orcorner of an interferometric cavity (or between adjoininginterferometric cavities) that supports an electrode (and/or mirror)and/or maintains or helps to maintain a desired distance betweenelectrodes (and/or mirrors). Accordingly, the post structure may beadjacent an open region and may be an orthogonally extending support(e.g., support 18). As described above, the electrode or mirrorsupported by the post structure may comprise a flexible member thatflexes in the open region in the interferometric modulator withapplication of an electric field in the cavity. Post structurestypically have a width of about 3 to about 15 microns, although thewidth of the post structure may be outside this range. The shape of thepost structure may vary as well. The post structure may have a heightthat corresponds approximately to the cavity height (e.g., the spacingbetween the upper and lower mirrors). The height of the post structure,however, may be larger or smaller. For example, the post structure maybe formed on a layer of material or on a pedestal and thus be raised toa level above the lower mirror. Similarly, the post structure may extendto a height higher than the upper mirror or to a depth lower than thelower mirror. See, e.g., FIG. 6C which shows the upper mirror attachedto an electrode supported by the post structure.

Post structures may be formed from various materials (e.g., metals,silicon oxide, metal oxides, polymers, etc.) having optical propertiesthat may differ significantly from one another. It has been found thatthe configuration of the post structure and the material(s) from whichit is constructed may significantly affect the performance of theinterferometric modulator. For example, FIG. 7A shows a cross-section ofan interferometric modulator that schematically illustrates atransparent post structure 305 and an interferometric cavity 310. Lightentering through the substrate 315 and entering the post structure 305may reflect from the upper mirror structure 320 and exit back throughthe substrate 315 as depicted by the series of arrows 325 in FIG. 7A.The optical characteristics of the post are largely uncontrolled andunlikely to be beneficial when the configuration of the post 305 and thematerial(s) from which it is made are selected for reasons unrelated tothe optical characteristics of the reflected light depicted by theseries of arrows 325.

As another example, FIG. 7B shows a cross-section of an interferometricmodulator that schematically illustrates a reflective post structure 350and an interferometric cavity 355. Light entering through the substrate360 reflects from the base of the post 350 and exits back through thesubstrate 360 as depicted by the series of arrows 365 in FIG. 7B. As inFIG. 7A, the optical characteristics of the reflected light depicted bythe series of arrows 365 are uncontrolled and unlikely to be beneficial.

As another example, FIG. 8A shows a photomicrograph of an array ofinterferometric modulators having metal posts. The bright spots 405result from light reflecting from the bases of the metal posts. FIG. 8Bshows a similar photomicrograph in which the dark spots 410 result fromlight passing through transparent silicon oxide posts. The color of thedark spots 410 is generally different from the light that exits from theinterferometric modulators.

It has now been found that optical elements may be incorporated into thepost structures of interferometric modulators in order to providevarious desirable optical effects. In one embodiment, the opticalelement is a reflector. This reflector may have various configurations.For example, FIG. 9 shows a cross-section of an interferometricmodulator that schematically illustrates post structures that compriseoptical elements. In FIG. 9, a reflector 550 is fabricated within atransparent post structure 555. This reflector 550 has a reflectivesurface that reflects incoming light incident thereon. This reflector550 may comprise a reflective material such as metal. The reflector 550may be formed using semiconductor fabrication techniques, for example,by depositing silicon oxide as a lower post section 555A, then formingthe reflector 550 comprising, e.g., metal, then depositing additionalsilicon oxide as an upper post section 555B. The optical element withinthe post structure may also be a reflector that is a component of anetalon (Fabry-Perot interferometer), e.g., an etalon 565 formed by anupper metal reflector 570 and the reflector 575. The etalon 565 forms anoptical cavity (a Fabry-Perot cavity) that contains the post structurematerial(s), e.g., silicon oxide. The color of reflected light 580exiting the etalon 565 may be controlled by controlling the verticalposition of the reflector 570 within the post structure 585 (as well asthe material between the reflectors 570 and 575). The color of thereflected light 580 may be adjusted to produce a black appearance byadjusting the vertical position of the reflector so that substantiallyall of the incident light or visible incident light is absorbed or isnot reflected back toward a viewer, thereby producing a dark etalon. Anetalon 588 (e.g., a dark or colored etalon) may also be incorporatedinto a post structure by incorporating two metal reflector layers 590,592 into the post structure as illustrated in FIG. 9. The color of theetalon 588 may be adjusted by controlling the thickness of the postmaterial 591 between the reflector layers.

The reflectors 550, 570, 590 and 592 are depicted in FIG. 9 as havingreflective surfaces that are substantially parallel to the reflector575. Those skilled in the art will understand that optical elements suchas reflectors may be oriented at various angles and configured invarious shapes. FIG. 10 shows additional examples of optical elementsthat may be incorporated into the post structures of interferometricmodulators. In FIG. 10, reflectors 605, 610, 615, 620 have beenfabricated within post structures 606, 611, 616, 621 using semiconductorfabrication techniques. The surfaces of the reflectors 605, 610, 615,620 are inclined at various angles. Optical elements having angledsurfaces may be fabricated using various techniques known to thoseskilled in the art. Such techniques include, for example, tapered angleetching (see, e.g., U.S. Pat. No. 5,473,710). On the left side of FIG.10, the upper mirror 625 is in a raised position. Light from a backlightsource 630 is reflected from the inclined surfaces of the reflectors605, 610 to the upper mirror 625 as indicated by the series of arrows635. Thus, the reflectors 605, 610 are examples of optical elementsconfigured to direct light into the interferometric cavity 623. Thedirected light also reflects from the upper mirror 625 and exits asindicated by the arrows 626, thereby increasing the brightness of theinterferometric modulator.

On the right side of FIG. 10, the upper mirror 650 is in a loweredposition. Light from the backlight source 660 is reflected from theinclined surfaces of the reflectors 615, 620 generally back towards thesource 660 (instead of through the post structure) as indicated by theseries of arrows 665. FIG. 10 also illustrates a dark etalon 673 formedby incorporating two metal reflectors 671, 672 into the post structure621 that includes reflector 620. Thus, FIG. 10 illustrates the use ofoptical elements within post structures to control backlighting and theincorporation of multiple optical elements into the same post structure.Those skilled in the art will appreciate that FIG. 10 illustrates thatthe performance of an optical element in a post structure may varydepending on the state (e.g., driven or undriven) of a nearbyinterferometric modulator.

FIG. 11 illustrates the use of an optical element in a post structure toincrease the brightness of an interferometric modulator by redirectinglight coming from the front of the interferometric modulator into theinterferometric cavity. On the left side of FIG. 11, the upper mirror705 is in a raised position. A series of arrows 710 represents lightcoming from a front source 702 that enters a post structure 715,reflects from an angled reflector 720 to the upper mirror 705, and thenexits the interferometric cavity 725 back in the general direction ofthe source 702, thereby increasing brightness. On the right side of FIG.11, the upper mirror 750 is in a lowered position, and a similarconfiguration is used to increase black level by redirecting light(represented by a series of arrows 755) away from the source 703. Thuslight from the front source 703 reflects from the angled surface of thereflector 760 and exits the back side of the interferometric cavity 765in a direction generally away from the source 703.

Those skilled in the art will understand that various optical elementshaving a variety of configurations may be incorporated into poststructures. Non-limiting examples of such optical elements includereflectors, etalons, light scattering elements (such as microscopicglass particles), light diffracting elements, total internal reflection(TIR) elements, and refractive elements. Lenses and prisms are possible.The surfaces of the optical elements such as the surfaces of thereflectors may be curved (e.g. spherical or parabolic) or flat, andinclined or declined at various angles. Likewise, lenses may beconfigured in various ways, e.g., convex, concave, etc., and also may beinclined or declined at various angles within the post structure.Asymmetrical as well as symmetrical shapes and configurations arepossible. These surfaces of the optical elements may be smooth or rough.Reflection may be specular or diffuse. The optical elements may belocated in different positions in the post structure. The opticalelement may be located at different heights and may be off-center withinthe post. The optical element may have different orientations and may betilted. Different posts structures may have optical elements withdifferent characteristics.

Another embodiment provides a method for making an interferometricmodulator. The steps in such a method 800 (FIG. 12) may be carried outusing techniques known to those skilled in the art. The process beginsat step 805 by depositing a reflective layer onto a substrate to form afirst mirror. The deposition of the reflective layer may be conductedby, e.g., chemical vapor deposition of a semi-reflective material suchas a metal (e.g., indium tin oxide and/or chrome). The formation of thefirst mirror at step 805 may further comprise depositing a dielectricmaterial (e.g., silicon oxide) over the metal layer. Those skilled inthe art will understand that the first mirror may be an optical stack,and thus formation of the first mirror at step 805 may involvedepositing multiple metal layers, e.g., chrome and indium tin oxide.

The process continues at step 810 by depositing a sacrificial layer overthe first mirror. The deposition of the sacrificial layer may beconducted by, e.g., chemical vapor deposition of a material that may beselectively removed in a later etching step. Examples of suchsacrificial materials include molybdenum and silicon. The processcontinues at step 815 by forming apertures in the sacrificial layerusing masking and etching techniques known to those skilled in the art.The process continues at step 820 by depositing post material into theapertures. Post material that is optically transmissive to visible lightmay be used. Examples of suitable post materials include silicon dioxideand photoresists, which may be deposited by, e.g., known spin-on andchemical vapor deposition techniques. In an embodiment, the depositedpost material partially fills the apertures, depending on the desiredvertical position of the optical element within the post. A layer ofmaterial for forming the optical element is deposited over the postmaterial within the aperture in a subsequent step 825. Various knowndeposition and/or patterning methods (such as tapered etching for angledsurfaces) may be used to form the optical element. Optionally,additional post material may be deposited over the optical elementwithin the aperture.

The process continues at step 830 by forming a moveable second mirrorover the sacrificial layer and the optical element. The formation of themoveable second mirror may be conducted in various ways, depending onthe desired mirror configuration as discussed above. The processcontinues at step 835 by removing the sacrificial layer to thereby forman interferometric cavity. Various etching methods may be used toefficiently remove the sacrificial layer, e.g., by exposing thesacrificial layer to an etchant such as XeF₂ that selectively removessacrificial materials such as molybdenum and silicon. Those skilled inthe art will understand that the process illustrated in FIG. 12 may bemodified as needed to produce interferometric modulators having avariety of configurations.

Those skilled in the art will appreciate that a post structure maycontain a plurality of optical elements. For examples, two or morereflectors may be fabricated into a post structures at various heightsusing minor modifications of the fabrication methods described above.Those skilled in the art will also appreciate that the use of such aplurality of optical elements in a post structure may be used to providevarious optical benefits or combinations thereof, e.g., a wider varietyof colors than the use of a single optical element.

While the above detailed description has shown, described, and pointedout novel features of the invention as applied to various embodiments,it will be understood that various omissions, substitutions, and changesin the form and details of the device or process illustrated may be madeby those skilled in the art without departing from the spirit of theinvention. As will be recognized, the present invention may be embodiedwithin a form that does not provide all of the features and benefits setforth herein, as some features may be used or practiced separately fromothers.

1. An interferometric modulator comprising: a substrate; a firstreflective surface over the substrate, the first reflective surfacebeing at least partially reflective and at least partially transparentto light; a second reflective surface over the first reflective surface,the second reflective surface movable with respect to the firstreflective surface; and a support structure configured to at leastpartially support the second reflective surface, the support structurecomprising an optical element.
 2. The interferometric modulator of claim1, wherein the optical element comprises a lens.
 3. The interferometricmodulator of claim 2, wherein surfaces of the lens are spherical.
 4. Theinterferometric modulator of claim 2, wherein surfaces of the lens areparabolic.
 5. The interferometric modulator of claim 2, wherein surfacesof the lens are concave.
 6. The interferometric modulator of claim 2,wherein surfaces of the lens are convex.
 7. The interferometricmodulator of claim 1, wherein the optical element comprises a prism. 8.The interferometric modulator of claim 7, wherein surfaces of the prismare inclined with respect to the post structure.
 9. The interferometricmodulator of claim 7, wherein surfaces of the prism are declined withrespect to the post structure.
 10. The interferometric modulator ofclaim 1, wherein surfaces of the optical element are symmetrical. 11.The interferometric modulator of claim 1, wherein surfaces of theoptical element are asymmetrical.
 12. The interferometric modulator ofclaim 1, wherein surfaces of the optical element are smooth.
 13. Theinterferometric modulator of claim 1, wherein surfaces of the opticalelement are rough.
 14. The interferometric modulator of claim 1, whereinthe optical element is configured to specularly reflect light.
 15. Theinterferometric modulator of claim 1, wherein the optical element isconfigured to diffusely reflect light.
 16. The interferometric modulatorof claim 1, wherein the optical element is disposed off-center from thepost structure.
 17. An interferometric modulator array comprising: afirst reflective surface over a substrate; a plurality of secondreflective surfaces over the first reflective surface, each of thesecond reflective surfaces movable with respect to the first reflectivesurface; and a plurality of support structures configured to at leastpartially support the second reflective surfaces, wherein at least someof the plurality of support structures comprise an optical element. 18.The interferometric modulator array of claim 17, wherein some of theoptical elements are different from others of the optical elements. 19.The interferometric modulator array of claim 18, wherein a height of thesome of the optical elements are different from a height of the other ofthe optical elements.
 20. The interferometric modulator array of claim17, wherein some of the optical elements comprise an etalon.